Shi, X., Zhang, S., Chen, D., Wang, J., Chen, J., Xie, B., . . . Li, Y. (2019). A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators. Micromachines (Basel).
Chicago ZitierstilShi, Xiaoqing, Sen Zhang, Deyong Chen, Junbo Wang, Jian Chen, Bo Xie, Yulan Lu, und Yadong Li. "A Resonant Pressure Sensor Based Upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators." Micromachines (Basel) 2019.
MLA ZitierstilShi, Xiaoqing, et al. "A Resonant Pressure Sensor Based Upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators." Micromachines (Basel) 2019.
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