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Deposition of Silicon-Based Stacked Layers for Flexible Encapsulation of Organic Light Emitting Diodes
In this study, inorganic silicon oxide (SiO(x))/organic silicon (SiC(x)H(y)) stacked layers were deposited by a radio frequency inductively coupled plasma chemical vapor deposition system as a gas diffusion barrier for organic light-emitting diodes (OLEDs). The effects of thicknesses of SiO(x) and S...
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| Publicado no: | Nanomaterials (Basel) |
|---|---|
| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6669626/ https://ncbi.nlm.nih.gov/pubmed/31340501 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano9071053 |
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