Hudait, M. K., Clavel, M. B., Liu, J., & Bhattacharya, S. (2018). In Situ SiO(2) Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiO(x) Atomic Layer Deposition Process. ACS Omega.
Citación estilo ChicagoHudait, Mantu K., Michael B. Clavel, Jheng-Sin Liu, y Shuvodip Bhattacharya. "In Situ SiO(2) Passivation of Epitaxial (100) and (110)InGaAs By Exploiting TaSiO(x) Atomic Layer Deposition Process." ACS Omega 2018.
Cita MLAHudait, Mantu K., Michael B. Clavel, Jheng-Sin Liu, y Shuvodip Bhattacharya. "In Situ SiO(2) Passivation of Epitaxial (100) and (110)InGaAs By Exploiting TaSiO(x) Atomic Layer Deposition Process." ACS Omega 2018.
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