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Multi-scale investigation in the frequency domain of Ar/HMDSO dusty plasma with pulsed injection of HMDSO
A combination of time-resolved optical emission spectroscopy measurements and collisional-radiative modeling is used to investigate the phenomena occurring over multiple time scales in the frequency domain of a low-pressure, axially-asymmetric capacitively-coupled RF argon plasma with pulsed injecti...
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| 出版年: | Plasma Sources Sci Technol |
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| 主要な著者: | , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6640068/ https://ncbi.nlm.nih.gov/pubmed/31327895 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1361-6595/ab07cc |
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