MEMS-Based Wavelength-Selective Bolometers

We propose and experimentally demonstrate a compact design for membrane-supported wavelength-selective infrared (IR) bolometers. The proposed bolometer device is composed of wavelength-selective absorbers functioning as the efficient spectroscopic IR light-to-heat transducers that make the amorphous...

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Pubblicato in:Micromachines (Basel)
Autori principali: Dao, Thang Duy, Doan, Anh Tung, Ishii, Satoshi, Yokoyama, Takahiro, Ørjan, Handegård Sele, Ngo, Dang Hai, Ohki, Tomoko, Ohi, Akihiko, Wada, Yoshiki, Niikura, Chisato, Miyajima, Shinsuke, Nabatame, Toshihide, Nagao, Tadaaki
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI 2019
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Article
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC6632019/
https://ncbi.nlm.nih.gov/pubmed/31234373
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10060416
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