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Metrology for the next generation of semiconductor devices
The semiconductor industry continues to produce ever smaller devices that are ever more complex in shape and contain ever more types of materials. The ultimate sizes and functionality of these new devices will be affected by fundamental and engineering limits such as heat dissipation, carrier mobili...
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| Publicado no: | Nat Electron |
|---|---|
| Main Authors: | , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6605074/ https://ncbi.nlm.nih.gov/pubmed/31276101 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41928-018-0150-9 |
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