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Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects

The characteristics of a surface, particularly the roughness, play an important role in different fields of the industry and have to be considered to ensure quality standards. Currently, there are numerous sophisticated methods for measuring surface roughness but plenty of them cause long-term damag...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Pöller, Franziska, Salazar Bloise, Félix, Jakobi, Martin, Wang, Shengjia, Dong, Jie, Koch, Alexander W.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6567356/
https://ncbi.nlm.nih.gov/pubmed/31091662
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19102215
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