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Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity
Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Sur...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6567304/ https://ncbi.nlm.nih.gov/pubmed/31137915 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19102421 |
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