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2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope
The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) f...
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| 發表在: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
MDPI
2019
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6562488/ https://ncbi.nlm.nih.gov/pubmed/31052229 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10050295 |
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