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Scaling growth rates for perovskite oxide virtual substrates on silicon
The availability of native substrates is a cornerstone in the development of microelectronic technologies relying on epitaxial films. If native substrates are not available, virtual substrates - crystalline buffer layers epitaxially grown on a structurally dissimilar substrate - offer a solution. Re...
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| Pubblicato in: | Nat Commun |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Nature Publishing Group UK
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6549169/ https://ncbi.nlm.nih.gov/pubmed/31165726 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-019-10273-2 |
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