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Electrochemical nanoimprinting of silicon

Scalable nanomanufacturing enables the commercialization of nanotechnology, particularly in applications such as nanophotonics, silicon photonics, photovoltaics, and biosensing. Nanoimprinting lithography (NIL) was the first scalable process to introduce 3D nanopatterning of polymeric films. Despite...

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Detalhes bibliográficos
Publicado no:Proc Natl Acad Sci U S A
Main Authors: Sharstniou, Aliaksandr, Niauzorau, Stanislau, Ferreira, Placid M., Azeredo, Bruno P.
Formato: Artigo
Idioma:Inglês
Publicado em: National Academy of Sciences 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6535012/
https://ncbi.nlm.nih.gov/pubmed/31068475
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1073/pnas.1820420116
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