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Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode

This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control n...

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Bibliografske podrobnosti
izdano v:Micromachines (Basel)
Main Authors: Kim, Kwanghyun, Moon, Seunghwan, Kim, Jinhwan, Park, Yangkyu, Lee, Jong-Hyun
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2019
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC6523534/
https://ncbi.nlm.nih.gov/pubmed/30934767
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040217
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