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Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes †
This paper presents a method to simultaneously determine the thickness and permittivity of thin layers from multi-frequency reflection coefficient measurements using an open-ended coaxial probe. This is achieved by exploiting that the probe becomes radiating at frequencies higher than the probe’s ty...
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| Published in: | Sensors (Basel) |
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| Main Authors: | , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI
2019
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6514552/ https://ncbi.nlm.nih.gov/pubmed/31013859 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19081765 |
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