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Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode
Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the...
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| Publicat a: | Proceedings (MDPI) |
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| Autors principals: | , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2017
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6512964/ https://ncbi.nlm.nih.gov/pubmed/31093601 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/proceedings1040277 |
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