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Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the...

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Detalhes bibliográficos
Publicado no:Proceedings (MDPI)
Main Authors: Medina, Lior, Gilat, Rivka, Ilic, Bojan, Krylov, Slava
Formato: Artigo
Idioma:Inglês
Publicado em: 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6512964/
https://ncbi.nlm.nih.gov/pubmed/31093601
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/proceedings1040277
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