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CCD Multi-Ion Image Sensor with Four 128 × 128 Pixels Array

A semiconductor array pH image sensor consisting of four separated blocks was fabricated using charged coupled device (CCD) and complementary metal oxide semiconductor (CMOS) technologies. The sensing surface of one of the four blocks was Si(3)N(4) and this block responded to H(+). The surfaces of t...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Hattori, Toshiaki, Dasai, Fumihiro, Sato, Hikaru, Kato, Ryo, Sawada, Kazuaki
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6479592/
https://ncbi.nlm.nih.gov/pubmed/30939859
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071582
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