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An Optical MEMS Acoustic Sensor Based on Grating Interferometer
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6479327/ https://ncbi.nlm.nih.gov/pubmed/30925691 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19071503 |
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