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Maskless Spatioselective Functionalization of Silicon Nanowires
Spatioselective functionalization of silicon nanowires was achieved without using a masking material. The designed process combines metal‐assisted chemical etching (MACE) to fabricate silicon nanowires and hydrosilylation to form molecular monolayers. After MACE, a monolayer was formed on the expose...
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| Veröffentlicht in: | ChemNanoMat |
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| Hauptverfasser: | , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
John Wiley and Sons Inc.
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6473541/ https://ncbi.nlm.nih.gov/pubmed/31032177 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/cnma.201800072 |
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