Fabrication of Nanopillar Crystalline ITO Thin Films with High Transmittance and IR Reflectance by RF Magnetron Sputtering

Nanopillar crystalline indium tin oxide (ITO) thin films were deposited on soda-lime glass substrates by radio frequency (RF) magnetron sputtering under the power levels of 100 W, 150 W, 200 W and 250 W. The preparation process of thin films is divided into two steps, firstly, sputtering a very thin...

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Bibliografiske detaljer
Udgivet i:Materials (Basel)
Main Authors: Dong, Ling, Zhu, Guisheng, Xu, Huarui, Jiang, Xupeng, Zhang, Xiuyun, Zhao, Yunyun, Yan, Dongliang, Yuan, Le, Yu, Aibing
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2019
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6471012/
https://ncbi.nlm.nih.gov/pubmed/30909418
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12060958
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