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Optical screw-wrench for microassembly

For future micro- and nanotechnologies, the manufacturing of miniaturized, functionalized, and integrated devices is indispensable. In this paper, an assembly technique based on a bottom-up strategy that enables the manufacturing of complex microsystems using only optical methods is presented. A scr...

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Publicat a:Microsyst Nanoeng
Autors principals: Köhler, Jannis, Ksouri, Sarah Isabelle, Esen, Cemal, Ostendorf, Andreas
Format: Artigo
Idioma:Inglês
Publicat: Nature Publishing Group 2017
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC6445005/
https://ncbi.nlm.nih.gov/pubmed/31057851
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.83
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