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Advances in diamond nanofabrication for ultrasensitive devices
This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano- and micro-mechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to en...
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| Publicado no: | Microsyst Nanoeng |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6444997/ https://ncbi.nlm.nih.gov/pubmed/31057885 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2017.61 |
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