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Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator

In this paper, we report a novel nanoscale wrinkle-structure fabrication process using fluorocarbon plasma on poly(dimethylsiloxane) (PDMS) and Solaris membranes. Wrinkles with wavelengths of hundreds of nanometers were obtained on these two materials, showing that the fabrication process was univer...

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Détails bibliographiques
Publié dans:Microsyst Nanoeng
Auteurs principaux: Cheng, Xiaoliang, Miao, Liming, Su, Zongming, Chen, Haotian, Song, Yu, Chen, Xuexian, Zhang, Haixia
Format: Artigo
Langue:Inglês
Publié: Nature Publishing Group 2017
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC6444979/
https://ncbi.nlm.nih.gov/pubmed/31057847
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.74
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