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Precision in harsh environments

Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanical disturbances, electromagnet...

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Detalhes bibliográficos
Publicado no:Microsyst Nanoeng
Main Authors: French, Paddy, Krijnen, Gijs, Roozeboom, Fred
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6444743/
https://ncbi.nlm.nih.gov/pubmed/31057836
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.48
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