SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Over the past few decades, polydimethylsiloxane (PDMS) has become the material of choice for a variety of microsystem applications, including microfluidics, imprint lithography, and soft microrobotics. For most of these applications, PDMS is processed by replication molding; however, new application...

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Detaylı Bibliyografya
Yayımlandı:Microsyst Nanoeng
Asıl Yazarlar: Gorissen, Benjamin, Van Hoof, Chris, Reynaerts, Dominiek, De Volder, Michael
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: Nature Publishing Group 2016
Konular:
Article
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC6444735/
https://ncbi.nlm.nih.gov/pubmed/31057834
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.45
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