Recent advances in nanorobotic manipulation inside scanning electron microscopes

A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled sampl...

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Detalhes bibliográficos
Publicado no:Microsyst Nanoeng
Main Authors: Shi, Chaoyang, Luu, Devin K, Yang, Qinmin, Liu, Jun, Chen, Jun, Ru, Changhai, Xie, Shaorong, Luo, Jun, Ge, Ji, Sun, Yu
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Review Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6444728/
https://ncbi.nlm.nih.gov/pubmed/31057824
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/micronano.2016.24
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