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Scalable Manufacturing of Single Nanowire Devices Using Crack-Defined Shadow Mask Lithography

[Image: see text] Single nanowires (NWs) have a broad range of applications in nanoelectronics, nanomechanics, and nanophotonics, but, to date, no technique can produce single sub-20 nm wide NWs with electrical connections in a scalable fashion. In this work, we combine conventional optical and crac...

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Detalhes bibliográficos
Publicado no:ACS Appl Mater Interfaces
Main Authors: Enrico, Alessandro, Dubois, Valentin, Niklaus, Frank, Stemme, Göran
Formato: Artigo
Idioma:Inglês
Publicado em: American Chemical Society 2019
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6426283/
https://ncbi.nlm.nih.gov/pubmed/30698940
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsami.8b19410
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