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Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches
A novel actuator toward a low voltage actuation and fast response in RF-MEMS (radio frequency micro-electro-mechanical systems) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-s...
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| Udgivet i: | Sensors (Basel) |
|---|---|
| Main Authors: | , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2019
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6412643/ https://ncbi.nlm.nih.gov/pubmed/30791445 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19040864 |
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