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Laser-writable high-k dielectric for van der Waals nanoelectronics
Similar to silicon-based semiconductor devices, van der Waals heterostructures require integration with high-k oxides. Here, we demonstrate a method to embed and pattern a multifunctional few-nanometer-thick high-k oxide within various van der Waals devices without degrading the properties of the ne...
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| Publicado no: | Sci Adv |
|---|---|
| Main Authors: | , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Association for the Advancement of Science
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6357741/ https://ncbi.nlm.nih.gov/pubmed/30746444 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1126/sciadv.aau0906 |
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