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Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns
Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning. The MEMS mirror co...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6356757/ https://ncbi.nlm.nih.gov/pubmed/30669314 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10010067 |
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