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Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns
Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning. The MEMS mirror co...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2019
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6356757/ https://ncbi.nlm.nih.gov/pubmed/30669314 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10010067 |
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