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Highly Conductive and Transparent AZO Films Fabricated by PLD as Source/Drain Electrodes for TFTs
Aluminum-doped ZnO (AZO) has huge prospects in the field of conductive electrodes, due to its low price, high transparency, and pro-environment. However, enhancing the conductivity of AZO and realizing ohmic contact between the semiconductor and AZO source/drain (S/D) electrodes without thermal anne...
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| Gepubliceerd in: | Materials (Basel) |
|---|---|
| Hoofdauteurs: | , , , , , , , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI
2018
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6317027/ https://ncbi.nlm.nih.gov/pubmed/30563271 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma11122480 |
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