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Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices
The low fabrication cost of SU-8-based devices has opened the fields of point-of-care devices (POC), µTAS and Lab-on-Chip technologies, which call for cheap and disposable devices. Often this translates to free-standing, suspended devices and a reusable carrier wafer. This necessitates a sacrificial...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6316518/ https://ncbi.nlm.nih.gov/pubmed/30572576 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9120673 |
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