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Self-Calibration and Performance Control of MEMS with Applications for IoT

A systemic problem for microelectromechanical systems (MEMS) has been the large gap between their predicted and actual performances. Due to process variations, no two MEMS have been able to perform identically. In-factory calibration is often required, which can represent as much as three-fourths of...

Täydet tiedot

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Bibliografiset tiedot
Julkaisussa:Sensors (Basel)
Päätekijä: Clark, Jason
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MDPI 2018
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC6308620/
https://ncbi.nlm.nih.gov/pubmed/30551627
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18124411
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