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Dry Etching of Copper Phthalocyanine Thin Films: Effects on Morphology and Surface Stoichiometry
We investigate the evolution of copper phthalocyanine thin films as they are etched with argon plasma. Significant morphological changes occur as a result of the ion bombardment; a planar surface quickly becomes an array of nanopillars which are less than 20 nm in diameter. The changes in morphology...
Bewaard in:
| Gepubliceerd in: | Molecules |
|---|---|
| Hoofdauteurs: | , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI
2012
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6268232/ https://ncbi.nlm.nih.gov/pubmed/22922282 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/molecules170910119 |
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