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A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide
We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circula...
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| Publicado en: | Sensors (Basel) |
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| Autores principales: | , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6263654/ https://ncbi.nlm.nih.gov/pubmed/30469328 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18114061 |
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