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Coherent Tabletop EUV Ptychography of Nanopatterns

Coherent diffraction imaging (CDI) or lensless X-ray microscopy has become of great interest for high spatial resolution imaging of, e.g., nanostructures and biological specimens. There is no optics required in between an object and a detector, because the object can be fully recovered from its far-...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Truong, Nguyen Xuan, Safaei, Reza, Cardin, Vincent, Lewis, Scott M., Zhong, Xiang Li, Légaré, François, Denecke, Melissa A.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6232105/
https://ncbi.nlm.nih.gov/pubmed/30420602
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-34257-2
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