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Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employe...
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| Publicado en: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6215217/ https://ncbi.nlm.nih.gov/pubmed/30424432 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9100499 |
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