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Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy
In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce s...
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2017
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190285/ https://ncbi.nlm.nih.gov/pubmed/30400416 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8070226 |
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