Two-Dimensional Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors with Differential Structure

A two-dimensional (2D) magnetic field sensor consisting of four silicon magnetic sensitive transistors (SMSTs) with similar characteristics is presented in this paper. By use of micro-electromechanical systems (MEMS) and integrated packaging technology, this sensor fabricated by using the silicon wa...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Yang, Xianghong, Zhao, Xiaofeng, Bai, Yunjia, Lv, Meiwei, Wen, Dianzhong
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2017
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6190269/
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8040095
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