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A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device

This paper reports a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8. The method is based on epoxide opening and dehydration reactions between surface-modified PDMS and SU-8. A PDMS replica is first activated via the low-cost lab equipment, i.e., the oxygen plasm...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Zhu, Zhen, Chen, Pan, Liu, Kegang, Escobedo, Carlos
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2016
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6190230/
https://ncbi.nlm.nih.gov/pubmed/30404401
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7120230
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