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Love-Mode MEMS Devices for Sensing Applications in Liquids

Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were...

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Vydáno v:Micromachines (Basel)
Hlavní autoři: Caliendo, Cinzia, Sait, Smail, Boubenider, Fouad
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2016
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6190195/
https://ncbi.nlm.nih.gov/pubmed/30407388
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7010015
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