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Design and Analysis of MEMS Linear Phased Array

A structure of micro-electro-mechanical system (MEMS) linear phased array based on “multi-cell” element is designed to increase radiation sound pressure of transducer working in bending vibration mode at high frequency. In order to more accurately predict the resonant frequency of an element, the th...

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Detaylı Bibliyografya
Yayımlandı:Micromachines (Basel)
Asıl Yazarlar: Fan, Guoxiang, Li, Junhong, Wang, Chenghao
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI 2016
Konular:
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC6190136/
https://ncbi.nlm.nih.gov/pubmed/30407382
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7010008
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