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A Micro-Test Structure for the Thermal Expansion Coefficient of Metal Materials
An innovative micro-test structure for detecting the thermal expansion coefficient (TEC) of metal materials is presented in this work. Throughout this method, a whole temperature sensing moveable structures are supported by four groups of cascaded chevrons beams and packed together. Thermal expansio...
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| Izdano u: | Micromachines (Basel) |
|---|---|
| Glavni autori: | , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2017
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6190033/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8030070 |
| Oznake: |
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