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Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

Squeeze-film damping and acceleration load are two major issues in the design of inertial micro-switches. In order to deeply and systematically study these two issues, this paper proposes a typical vertically-driven inertial micro-switch, wherein the air and electrode gaps were chosen to design the...

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Bibliografski detalji
Izdano u:Micromachines (Basel)
Glavni autori: Peng, Yingchun, Wen, Zhiyu, Li, Dongling, Shang, Zhengguo
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2016
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC6189996/
https://ncbi.nlm.nih.gov/pubmed/30404409
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7120237
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