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Nanomechanical Motion Transducers for Miniaturized Mechanical Systems

Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- a...

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Bibliografische gegevens
Gepubliceerd in:Micromachines (Basel)
Hoofdauteurs: Kouh, Taejoon, Hanay, M. Selim, Ekinci, Kamil L.
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2017
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6189927/
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8040108
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