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Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review

The rapid development of nanotechnologies and sciences has led to the great demand for novel lithography methods allowing large area, low cost and high resolution nano fabrications. Characterized by unique sub-diffraction optical features like propagation with an ultra-short wavelength and great fie...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Wang, Changtao, Zhang, Wei, Zhao, Zeyu, Wang, Yanqin, Gao, Ping, Luo, Yunfei, Luo, Xiangang
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2016
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6189824/
https://ncbi.nlm.nih.gov/pubmed/30404291
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7070118
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