Inzelberg, A., & Linzon, Y. (2017). Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining. Micromachines (Basel).
Chicago Style CitationInzelberg, Adam, i Yoav Linzon. "Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining." Micromachines (Basel) 2017.
Cita MLAInzelberg, Adam, i Yoav Linzon. "Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining." Micromachines (Basel) 2017.
Atenció: Aquestes cites poden no estar 100% correctes.