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Stencil Lithography for Scalable Micro- and Nanomanufacturing
In this paper, we review the current development of stencil lithography for scalable micro- and nanomanufacturing as a resistless and reusable patterning technique. We first introduce the motivation and advantages of stencil lithography for large-area micro- and nanopatterning. Then we review the pr...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6189734/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8040131 |
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