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Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography

We used inclined lithography to fabricate a pneumatic microvalve for tall microchannels such as those used to convey large cells. The pneumatic microvalve consists of three layers. The upper layer is the actual liquid microchannel, which has a parallelogram-shaped cross section of width 500 μm, heig...

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Foilsithe in:Micromachines (Basel)
Main Authors: Kaminaga, Maho, Ishida, Tadashi, Omata, Toru
Formáid: Artigo
Teanga:Inglês
Foilsithe: MDPI 2016
Ábhair:
Rochtain Ar Líne:https://ncbi.nlm.nih.gov/pmc/articles/PMC6189707/
https://ncbi.nlm.nih.gov/pubmed/30404396
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi7120224
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