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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems

Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier pr...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Ortigoza-Diaz, Jessica, Scholten, Kee, Larson, Christopher, Cobo, Angelica, Hudson, Trevor, Yoo, James, Baldwin, Alex, Weltman Hirschberg, Ahuva, Meng, Ellis
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6187609/
https://ncbi.nlm.nih.gov/pubmed/30424355
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9090422
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