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Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO(2) Thin Films
Crystalline TiO(2) films were prepared on unheated glass substrates by radio frequency (RF) reactive magnetron sputtering at normal angle of incidence (a = 0°) and at glancing angle (a = 87°). The effect of the glancing angle on the structure, microstructure, and wetting properties of the films was...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187567/ https://ncbi.nlm.nih.gov/pubmed/30424322 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9080389 |
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