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Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance †
Ultra-high pressure measurement has significant applications in various fields such as high pressure synthesis of new materials and ultra-high pressure vessel monitoring. This paper proposes a novel ultra-high pressure sensor combining a truncated-cone structure and a silicon-on-insulator (SOI) piez...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187505/ https://ncbi.nlm.nih.gov/pubmed/30393281 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9010005 |
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